ZrO_2-TiO_2 thin films: a new material system for mid-infrared integrated photonics
نویسندگان
چکیده
منابع مشابه
ZrO2-TiO2 thin films: a new material system for mid-infrared integrated photonics
Mid-infrared (MIR, 2 6 μm wavelength) transparent metal oxides are attractive materials for planar integrated MIR photonic devices and sensing applications. In this report, we present reactive sputtering deposited ZrO2-TiO2 (ZTO) thin films as a new material candidate for integrated MIR photonics. The material structure and optical properties were systematically studied as a function of Ti conc...
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2013
ISSN: 2159-3930
DOI: 10.1364/ome.3.001537